RF/DC Sputtering system
We are one of the best manufacturers, traders, and suppliers of a comprehensive gamut of Sputtering Systems. These coating systems are designed using finest quality material and cutting-edge techniques in compliance with set standards. Our offered coating systems are tested on numerous parameters under the direction of our quality experts in order to deliver a flawless range. We provide these coating systems to different specifications as per the need of customers.
| Brand | BVT |
| Power | 5 kW |
| Voltage | 208-240 V AC, 50 / 60 Hz |
| Output frequency | 40 kHz |
Features:
- Rugged design
- High efficiency
- Sturdiness
Technical Specifications:
1. Magnetron cathode:
- magnetron cathode for DC of required Dia like 6 inch size.
- magnetron cathode for RF of required Dia like 6 inch size.
2. RF Power supply with DC/RF Switch box:
- Power capacity: 400 - 800 Watt max.
- Input 230 V single phase
- Output impedance 50 Ohm
- Frequency : 13.56 MHz
- Matching network: Automatic tuning
- DC/RF Switch box
- Make: Imported or Indegenious
3. DC Power supply
- Maximum power : 1000 - 2000 Watt (2 kW)
- Input voltage : 230 V single phase AC
- Output voltage 50 V DC to 1000 V DC variable with fine control
- Output current : 0 # 1 Amps variable with fine control
- Separate displays for voltage and current
- Control mechanism : SMPS based
4. Vacuum chamber
- Construction material: SS 304
- Design : Cylindrical Vacuum Chamber
- Achievable vacuum : 10-9 mbar or better
- Dimensions: Customized size for holding the magnetrons cathode, substrate holder and other accessories.
5. Ports
- Ports for Vacuum Pumping, Magnetrons, Vacuum gauges, Substrate holder with rotation assembly, Electrical feed through, Digital Thickness monitor and Blanks.
6. High Vacuum pump and backing pump (As per customer requirement)
7. Mass Flow Controllers
- Flow range : 0 -100 sccm
- Power supply with Digital display for control of the gas flow
8. Thickness Monitor
- Mechanism : Quartz crystal type
9. Vacuum gauge and valves of BVT make.
10. Substrate holder with heating and Substrate rotation:
- Magnetically coupled substrate rotation through DC drive for 5 #20 rpm rotation
- Substrate heating up to required temp like 700 Deg. C during deposition
- Temperature control with PID controller